Crystalline quality improvement of face-to-face annealed MOVPE-grown AlN on vicinal sapphire substrate with sputtered nucleation layer

Kenjiro Uesugi
Kenjiro Uesugi
Yuta Tezen
Yuta Tezen
Kenji Norimatsu
Kenji Norimatsu

Journal of Crystal Growth, pp. 1257222020.

Cited by: 0|Views2

Abstract:

•AlN templates with high crystalline qualities are fabricated on vicinal sapphires.•Fabrication processes are RF sputtering, MOVPE growth, and face-to-face annealing.•The concentrations of O, Si, and C impurities in the AlN template are low.•The surface of AlGaN grown on the AlN template is flat without large hillocks.

Code:

Data:

Get fulltext within 24h
Bibtex
Upload PDF

1.Your uploaded documents will be check within 24h, and coins will be credited to your account.

2.As the current system does not support cash withdrawal, you can add staff WeChat (AMxiaomai) to receive it as a red packet.

3.10 coins will be exchanged for 1 yuan.

?

Upload a single paper

for 5 coins

Wechat's Red Packet
?

Upload 50 articles

for 250 coins

Wechat's Red Packet
?

Upload 200 articles

for 1000 coins

Wechat's Red Packet
?

Upload 500 articles

for 2500 coins

Wechat's Red Packet
?

Upload 1000 articles

for 5000 coins

Wechat's Red Packet
Your rating :
0

 

Tags
Comments