Design of a novel 3D ultrasonic vibration platform with tunable characteristics

•The design, modeling, and experimental validation of a novel 3D ultrasonic vibration platform with tunable characteristics is presented.•Multiple vibration modes including 1D (linear) and 2D (in-plane or out-of-plane) vibrations can be achieved.•Both the vibration amplitude and frequency can be set to an arbitrary value within a wide range according to the fabrication requirement.•A novel flexure hinge, named T-shaped spatial flexure hinge is used to realize both in-plane and out-of-plane motions with a compact structure.•The maximum amplitude and frequency can reach around 50 nm and 20 kHz, i.e. ultrasonic frequency, respectively.