High-speed Epitaxial Growth of Y3Fe5O12 Thick Film with High Magnetization on (420) Y3Al5O12 Substrate Using Metal-organic Chemical Vapor Deposition

Materials Letters(2020)

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摘要
•High-speed epitaxial growth of YIG on YAG via MOCVD at deposition rate of 33 μm h−1.•SQUID magnetometry confirmed high magnetization greater than single crystals.•MOCVD can rapidly produce high-performance YIG alternative to PVD and LPE.
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关键词
Yttrium iron garnet,Chemical vapor deposition,Epitaxial growth
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