The behaviour of gold metallized AlN/Si and AlN/glass based SAW structures as temperature sensors.

Alexandra Nicoloiu,George E Stan,Claudia Nastase,George Boldeiu,Cristina Besleaga,Adrian Dinescu,Alexandru Muller

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2021）

引用 7|浏览8

暂无评分

摘要

Thin AlN piezoelectric layers have been deposited on high resistivity Si and glass substrates by reactive RF magnetron sputtering, in order to manufacture one-port gigahertz operating surface acoustic wave (SAW)-type resonators to be used as temperature sensors. The growth morphology surface topography, crystallographic structure, and crystalline quality of the AlN layers have been analyzed. Advan...

查看译文

关键词

Resonant frequency,Temperature sensors,Surface acoustic waves,III-V semiconductor materials,Aluminum nitride,Films,Temperature measurement

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要