Enhanced Production Of Electron Cyclotron Resonance Plasma By Positioning Plate-Tuner

We focus on microwave propagation in order to enhance productions efficiency of ECR plasma. We tune microwave hi vacuum chamber with the plate-tuner. It was confirmed that beam currents increase by the plate-tuner at the first-stage of tandem-type ECRIS in the previous study. In this work, we have conducted the similar experiment at the second-stage of the ECRIS. Absorbed microwave power and ion saturation current in ECR plasma change by positioning the plate-tuner. In addition, it is confirmed that there are correlations between ion saturation current and beam currents. We obtain the result that the plate-tuner is effective for ECR plasma productions in the case of even low microwave power.