Characterization Of Si-Dlc Films Synthesized By Low Cost Plasma-Enhanced Chemical Vapor Deposition

Diamond-like carbon (DLC) coatings offer versatile applications in surface engineering due to high hardness and strength, chemical and radiation resistance, biocompatibility and low friction coefficient. When doped with Si, such coatings demonstrate even more beneficial properties, such as lower friction coefficient and higher thermal stability. We demonstrate the instrumental developments of a plasmaenhanced chemical vapor deposition (PECVD) method and the use of an original low-cost set-up aimed to synthesize Si-doped DLC films using polyphenylmethylsiloxane (PFMS) precursors. These films on the surface of glass substrate were characterized by means of XPS, AFM, Raman spectroscopy, and nanoindentation. Dry fiction coefficient was found to be reduced for Si-doped DLC for 4-6 times in comparison with glass substrate. (C) 2020 Elsevier Ltd. All rights reserved.