Decomposition Behavior of III/V Semiconductor Precursor Gases in In-situ TEM MOVPE Investigations Observed by Mass Spectrometry
Microscopy and Microanalysis（2020）
关键词
tem movpe investigations,semiconductor,mass spectrometry,in-situ
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要