Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling robot. When the tool is operating, generally each PM is processing a wafer, and the robot is responsible for delivering the wafers from one PM to another. Thus, when a wafer is completed in a PM, the robot may be busy fo...