Integrated Scaln Photonic Circuits On Silicon Substrate

Shiyang Zhu,Qize Zhong,Nanxi Li,Ting Hu,Yuan Dong,Zhengji Xu,Yanyan Zhou,Yuan Hsing Fu,Navab Singh

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

ScAlN has been applied in piezoelectric micro-electro-mechanical systems, while application in photonics remains unexplored. Here, ScAlN photonic circuits on silicon are presented, demonstrating waveguide propagation loss of 9 +/- 2 dB/cm and microring quality factor of 1.4x10(4). (C) 2020 The Author(s)

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关键词

waveguide propagation loss,microring quality factor,piezoelectric microelectro-mechanical systems,silicon substrate,integrated photonic circuits,ScAlN

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