All MOCVD grown 250 nm gate length Al0.70Ga0.30N MESFETs

2018 76th Device Research Conference (DRC)(2018)

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摘要
High Al-composition AlGaN materials, by virtue of their ultra-wide band gap, are promising candidates for realizing high power density mm-wave transistors. However, low electron affinity in these materials make it very difficult to make ohmic contacts for Al-composition above 65%. On the other hand, to achieve high cutoff frequency, it is critical to scale the transistors. In this work, we report the first ever DC and small-signal RF performance of a scaled MOCVD-grown UWBG A 10.70 Ga 0.30 N MESFET with L G = 250 nm.
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关键词
High Al-composition AlGaN materials,ultra-wide band gap,high power density mm-wave transistors,low electron affinity,ohmic contacts,scaled MOCVD-grown UWBG Al0.70Ga0.30N MESFET,size 250.0 nm,Al0.7Ga0.7N
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