Development of Technology for Producing Nanowires on LiNbO3 Piezoelectric Plate Surface

Integration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acousto-nanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nano structures with acoustic piezoactive waves propagating in piezoelectric substrates. In this work the technology of nanowire production on the surface of lithium niobate plate has been developed. This technology is based on using electronic lithography method with help an electronic beam in a raster electronic microscope. The nanostructure consisting of nanowire with size 20nm x 180nm was placed in the center between IDTs of acoustic delay line. The volt-ampere characteristics of this nanowire in presence and at the absence of the acoustic wave were meazured by picoampermeter. The analysis has shown that presence of piezoactive acoustic wave is influenced on electric current in a nanowire.