Publisher's Note: "Room-temperature deposition of a poling-free ferroelectric AlScN film by reactive sputtering" [Appl. Phys. Lett. 118, 082902 (2021)]
APPLIED PHYSICS LETTERS(2021)
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要
APPLIED PHYSICS LETTERS(2021)