Analysis Of Tunable Bleustein-Gulyaev Permittivity Sensors

We present a novel electric permittivity sensor based on Bleustein-Gulyaev (BG) waves. Toward that end, we formulate the nonlinear electromechanical partial differential equations governing a BG wave resonator. We find that the permittivity of the material-under-test changes the sensor natural frequencies, thereby enabling the implementation of a frequency-shift permittivity sensor. We also find that the sensor sensitivity is enhanced by increasing bias voltage to drive the sensor into the nonlinear regime. Bias was found to be limited by electrical breakdown. The sensor was fabricated by depositing aluminum electrodes on a shear-poled lead zirconate titanate piezoelectric substrate. Experimental measurements of the displacement on the sensor surface were in good agreement with the developed model.