Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure

A power handling capability enhanced radio frequency micro-electro-mechanical system (RF MEMS) switch using modified-width cantilevers structure is presented. Among the cantilevers of the switch, the inner cantilevers width is larger than the outer one, which results in different forces and resistances on different contacts when they are actuated. The proposed design can suppress the skin-effect-l...