Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle

A particularly efficient piezoelectric MEMS mirror with the effective area of $10\times 10\ \ \text{mm}2$ for optical scanning applications has been developed using $\text{Sc}_{\mathrm{x}}\text{Al}_{1-\mathrm{x}}\mathrm{N}$ material as the actuator with Sc content up to $\mathrm{x}=0.43$. The architecture of this novel MEMS mirror is comprised of a large-size reflective micromirror plate and four ...