Glancing Angle Deposition of Nanostructured ZnO Films for Ultrasonics

Manuel Pelayo Garcia,Kevin Luke McAughey,Des Gibson,David Allan Hughes,Carlos García Núñez

2021 13th Spanish Conference on Electron Devices (CDE)（2021）

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摘要

Ultrasonic sensors have demonstrated great potential for non-destructive testing (NDT) of materials, being widely applicable in health care/monitoring (e.g. biomedical, muscle recovery, cancer early detection), industry, and defence (e.g. proximity sensors used in unnamed aerial vehicles - UAV; detection of submarines). Most conventional ultrasonic sensors are based on monolithic piezoelectric cer...

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关键词

glancing angle deposition,reactive sputtering,zinc oxide,piezoelectric sensor,ultrasounds

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