SiC and Diamond Membrane Based Pressure Sensors for Harsh Environments

In this work we analyze the behavior of pressure sensors based on membranes of chemically very inert materials and robust to atmospheric agents with non-neutral pH. The selected material for cheapness and chemical stability for the manufacture of low-cost pressure sensors is Silicon Carbide, even if a special section is dedicated to diamond membranes pressure sensors because of its unique chemical inertness. Considering also the electromagnetic noise as an aggressive element of the measurement environment, the low-cost reproduction via sensor - optical fiber coupling of a low-finesse Fabry-Perot interferometer was chosen as the reading setup. SiC membranes are realized by nanosecond LASER processing while those in diamond are made by CVD deposition and microelectronic etching techniques.