Enhancement of c-Axis Oriented Aluminum Nitride Films via Low Temperature DC Sputtering

Ze-Hui Chen,Chengying Li,Yueh-Han Chen,Shengyuan Chu,Cheng-Che Tsai,Cheng-Shong Hong

IEEE Sensors Journal（2021）

引用 6|浏览4

暂无评分

摘要

In this study, we successfully deposit c-axis oriented aluminum nitride (AlN) piezoelectric films at low temperature (100 °C) via the DC sputtering method with tilt gun. The X-ray diffraction (XRD) observations prove that the deposited films have a c-axis preferred orientation. Effective d33 value of the proposed films is 5.92 pm/V, which is better than most of the reported data using D...

查看译文

关键词

Films,Aluminum nitride,III-V semiconductor materials,Accelerometers,Micromechanical devices,Temperature measurement,Temperature

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要