Effect of substrate temperature on the growth of Nb3Sn film on Nb by multilayer sputtering

Md Nizam Sayeed,Uttar Pudasaini,Charles E. Reece,Grigory V. Eremeev,Hani E. Elsayed-Ali

Thin Solid Films（2022）

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摘要

•Nb3Sn films were fabricated by using multilayer sequential magnetron sputtering.•Surface morphology varied with varying substrate temperature.•Superconducting critical temperature of 17.76 K has been achieved.•Surface voids reduced at the substrate temperature of 250 °C.

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关键词

Niobium tin,Thin films,Multilayer sequential sputtering, microstructure,Superconducting properties

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