A Miniature Ionization Vacuum Sensor With a SiOₓ-Based Tunneling Electron Source

Wei Yang,Wenchao Liu,Xun Wang,Zhiwei Li,Fangyuan Zhan,Gengmin Zhang,Xianlong Wei

IEEE Transactions on Electron Devices（2021）

引用 3|浏览20

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摘要

A miniature ionization vacuum sensor (IVS) based on an on-chip SiOx-based tunneling electron source is reported. The vacuum sensor fabricated by microfabrication technologies exhibits a compact multilayered structure with overall dimensions of $13\times 9\times2.7$ mm3, where the electron source chip, Si...

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关键词

Electron sources,Tunneling,Silicon,Electron emission,Discharges (electric),Semiconductor device measurement,Junctions

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