Design and Simulation of an Electrostatic Energy Harvester for Biomedical Implants
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)(2021)
摘要
This paper presents the design of an electrostatic MEMS energy harvester for medical implant application. It examines solutions for constraining the motion of the mobile part in one direction and proposes an innovative spring architecture. Indeed, constraining the mobile part motion is essential to avoid undesired contact between comb electrodes. It is particularly important in environments in whi...
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关键词
Energy harvesting,MEMS,electrostatic transducer,heartbeat,low frequency,medical implant
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