High Performance Nanocrystalline Silicon Thin Film Transistors: Mechanical Device Reliability

High performance nanocrystalline silicon thin film transistors (nc-Si TFTs) on polyimide (PI) substrate are demonstrated successfully. Mechanical reliability of nc-Si TFTs on PI shows an excellent characteristic than hydrogenated amorphous silicon (a-Si:H) TFTs. The TFT density of state proves that the shallow-level or deep-level defects originate from different bending directions.