Side Wall Passivation of LWIR P-type Superlattice Detectors using Atomic Layer Deposition

Teressa Specht,Stephen Myers,Theodore J. Ronningen,Alireza Kazemi, David Hollingshead,Earl Fuller,Sanjay Krishna

2018 IEEE Research and Applications of Photonics In Defense Conference (RAPID)（2018）

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摘要

This work demonstrates the use of aluminum oxide passivation on the mesa sidewall of long-wave infrared p-type superlattice photodetectors applied by atomic layer deposition. The surface leakage current of the passivated photodetectors was reduced by an order of magnitude over the unpassivated photodetectors.

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关键词

long-wave superlattice infrared detectors,passivation,aluminum oxide,atomic layer deposition

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