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Spectrum modulation of a thin-film filter with visible and near infrared dual band-pass channel

JOURNAL OF INFRARED AND MILLIMETER WAVES(2020)

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摘要
A remote sensing camera needs a thin-film filter with visible (wavelength 500 similar to 720 nm) and near infrared (wavelength (1 064 +/- 1) nm) dual band-pass spectrum channels at any same geometric position. The spectrum and transmission of the two channels need was modulated accurately. JGS-1 fused quartz was used as the substrate,Ta2O5 and SiO2 thin film was used as high (H) and low (L) reflective index layers respectively. 52 and 88 layers was deposited on the two surfaces of substrate by dual ion beam sputtering method. The average transmission of 500 similar to 720 nm band reaches 92%,and the peak transmission of (1 064 +/- 1) nm band controlled in the range of (26 +/- 1) %.
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关键词
optical thin film,dual spectrum channel filter,ion beam sputtering deposition,spectrum modulation
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