Research on the Application of Nanometre Fiso Interferometer for Phase and Phase Element Detection Signal Processing

The use of nanometre fiso interferometer to measure heterodyne interference signals at the same time for phase and phase element detection and phase-locked frequency multiplication counting is employed here. After a certain logic mixing, a set of measurement results with a certain degree of redundancy can be obtained; the test results can be measured and resolved. The rate is better than 0.1 nm, and the measurement range is not limited by the lambda/2 period, thus overcoming the previous problems that is the measurement range of the phase measurement method is limited to one period and the resolution of the phase-locked frequency multiplication counting method is not easy to improve.