A Flexible Chip-Film Patch and a Flexible Strain Gauge Sensor Suitable for a Hybrid System-in-Foil Integration

IEEE Sensors Journal(2021)

引用 4|浏览14
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摘要
Hybrid Systems-in-Foil (HySiF) encompass large-area thin-film electronics and ultrathin, high performance CMOS chips, which are integrated into a flexible polymeric foil substrate. In this work, the individual components of a customized flexible sensor system are characterized in detail, i.e., a strain gauge and a readout ASIC, and the system functionality is proved. We employ the...
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关键词
Polyimides,Sensors,Strain measurement,Silicon,Coatings,Sensor systems,Metals
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