Measurement and simulation of the three-dimensional temperature field in an RF SOI chip

2021 27th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)(2021)

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摘要
We present in this study a novel way to determine the three-dimensional (3D) temperature field o f a R adio Frequency Silicon On Insulator (RF SOI) electronic chip, using several resistance temperature detectors (RTDs) embedded at different locations of the chip. The RTDs are designed and placed at different locations to experimentally obtain the temperature at key locations of the chip enabling t...
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关键词
Silicon on insulator,RF,thermal characterization,RTD,numerical simulation
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