Industrial Perspectives of SiC Bulk Growth

Wide Bandgap Semiconductors for Power Electronics(2021)

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摘要
Over the last 30 years, SiC materials growth has developed into a mature industry with multiple manufacturers of high-quality wafers who have supplied millions of wafers to the market. This industry has also increased the diameter of these wafers from 25 mm up to as large as 200 mm representing an almost two order of magnitude increase in surface area available for device manufactured on each wafer. Simultaneously, these manufacturers have increased the wafer quality to enable the creation of large power devices of 1 cm 2 area and above. It is expected that over the next decade, SiC will blossom into a very significant industry, with many commercial players and significant impact on future technology.
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关键词
bulk growth,industrial perspectives
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