A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications

Horng-Yuan Shih, Chin-Te Hsin,Cheng-Wei Yang,Hsin-Liang Chen, Jhe-Yuan Kuo

2021 International Symposium on Intelligent Signal Processing and Communication Systems (ISPACS)（2021）

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摘要

A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated with the MEMS sensor. The capacitive MEMS sensor has a sensitivity of 6.53 fF/kPa with a sensing range of 4-40 kPa (30-300 mmHg). The overall system has a measured conversion gain of 4.72 mV/kPa. The power dissipation of the whole circuit is only 6.46 μW.

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关键词

Micromechanical devices,Pressure sensors,Sensitivity,Communication systems,Signal processing,Gain measurement,Pressure measurement

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