Robust Breakdown Reliability and Improved Endurance in Hf 0.5 Zr 0.5 O 2 Ferroelectric Using Grain Boundary Interruption

Yannan Xu,Yang Yang,Shengjie Zhao,Tiancheng Gong,Pengfei Jiang,Shuxian Lv,Haoran Yu,Peng Yuan,Zhiwei Dang,Yaxin Ding,Yuan Wang,Yuting Chen,Yan Wang,Jinshun Bi,Qing Luo

IEEE Transactions on Electron Devices（2022）

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摘要

In this brief, we reported the improved break- down reliability and endurance in 10-nm Hf0.5Zr0.5O2(HZO) using grain boundary interruption. By inserting an amorphous Al2O3 layer in the middle of polycrystalline HZO, grain boundaries penetrating between the electrodes were interrupted. Compared with single-layer HZO [metal-ferroelectric-metal (...

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关键词

Electric breakdown,Reliability,Grain boundaries,Breakdown voltage,Leakage currents,Hafnium oxide,Zirconium

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