Simultaneous Measurements of the Fabricated Width and Thickness of Silicon Nitride Waveguides with Microring Resonators

Mohammadreza Jalali Azizpour, Duy-Thach Phan,Abubaker Tareki,Boris Le Drogoff,Mohamed Chaker,Michaël Ménard

2021 IEEE 17th International Conference on Group IV Photonics (GFP)（2021）

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摘要

We demonstrate the extraction of the dimensions of fabricated silicon nitride waveguides from the spectrum of a microring resonator. We show for the first time that this method is applicable with both the TE and TM polarizations.

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关键词

silicon nitride,ring resonator,microfabrication

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