Dose Dependence of the Enhancement of Thermal Oxidation for 6H-SiC by 30 keV18O+and20Ne+IrradiationTomoaki Yoneda, Toshitake Nakata,Makoto Kitabatake,Yoshiaki KidoJapanese Journal of Applied Physics(1998)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要