Improvement of the transient phenomena for highly precise positioning X-Y stage in in-plane type

A highly precise positioning actuator for a Scanning Prove Microscopes (SPM) and a magnetic recording evaluation system has been developed. The positioning actuator is consisted of a displacement amplifier mechanism and a stacked piezoelectric element. In this paper, we propose a new two dimensional positioning actuator composed of two pair of piezoelectric actuators, parallel links with square support spring and a positioning stage. The control performance and the positioning accuracy are verified. Furthermore, the influence of the tracking actuator on the transient phenomena of the stacked piezoelectric element precise positioning stage has been discussed.