Texture Development of YBaCuO Film Prepared by Chemical Vapor Deposition

Texture development of YBaCuO films prepared at 650°C and 900°C by chemical vapor deposition method was investigated. Both of the films which were prepared at 650°C and 900°C showed superconductivity above 77K(Tc,0 = 84.5 ∼ 88K). The preferred orientation of (001) normal to film surface was developed. The minor texture components such as (100) and (110) and the CuO second phase was included in the films and the amount of them was changed when the composition of vapor was changed. It indicates that the texture and the amount of second phase such as CuO can be easily controlled by changing vapor composition.