Hydrogen plasma treatment of MoS 2 with graphene protection

Anishkumar Soman,Robert A. Burke,Qui Li,Michael D. Valentin,Eugene Zakar,Ugochukwu Nsofor,Steven Hegedus,Ujjwal Das,Jianping Shi,Yanfeng Zhang,Tingyi Gu

conference on lasers and electro optics（2019）

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摘要

Hydrogen plasma treatment can create defects such as sulfur vacancies in single layer MoS 2 . A single layer graphene's protection can effectively reduce the defects formation as confirmed by Raman spectroscopy. © 2019 The Author(s)

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