Innovative Diamond Micro-Optics enabled by 3D Micro Printing

We present a novel method to fabricate arbitrary shaped 3D micro-optics in single crystal diamond, and we demonstrate and characterize Fresnel microlens arrays and blazed diffraction gratings. The fabrication process uses high resolution 3D dip-in laser lithography and chlorine-based reactive ion etching with low selectivity to obtain smooth etched surfaces.