How thin an optical coating? The case of atomic layer deposited TiO2 on native oxide/Si

Marcelo Barbalho Pereira, Gustavo R. Toniello,Klester dos Santos Souza,Flavio Horowitz

Optical Interference Coatings Conference (OIC) 2019 (2019), paper ThC.9（2019）

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摘要

A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.

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