Optical Phased Array with Electromechanical Phase Shifters

Marcel W. Pruessner,Rita Mahon,Brian J. Roxworthy,Dmitry A. Kozak,Nathan F. Tyndall,Todd H. Stievater,Peter G. Goetz,William S. Rabinovich

Frontiers in Optics（2019）

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摘要

We propose a chip-scale optical phased array (OPA) enabling steering along two orthogonal angles using integrated electromechanical optical phase shifters. Initial experimental results from fabricated silicon nitride OPAs are presented.

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