Tuning of structure, grain orientation and mechanical properties in reactively sputtered (Al,Mo,Ta,V,W)N

•(Al,Mo,Ta,V,W)N0.79 and -N0.33 show columnar microstructures.•The oxynitride features a renucleated finer, randomly oriented microstructure.•N-deficiency of (Al,Mo,Ta,V,W)N is beneficial for hardness and phase stability.•The oxynitride is harder than the N-rich nitride in as-deposited state.•The oxynitride cracks open during annealing due to formation of binary oxides.