Modelling and validation of a large area thin film uniform deposition on a rotating drum Using Microwave Reactive Sputtering
Optical Interference Coatings 2016 (2016), paper WA.10(2016)
摘要
A model has been developed and validated for predicting film uniformity based on sputtering yield, angular distribution, mask shielding and film growth process in a multipass microwave/magnetron sputtering system using Niobium deposition on glass.
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关键词
microwave reactive sputtering,drum
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