Te-based binary OTS selectors with excellent selectivity (>10 5 ), endurance (>10 8 ) and thermal stability (>450°C)

Jongmyung Yoo,Yunmo Koo,Solomon Amsalu Chekol,Jaehyuk Park,Jeonghwan Song,Hyunsang Hwang

symposium on vlsi technology（2018）

Cited 11|Views0

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Abstract

We have investigated various Te-based binary materials for Ovonic Threshold Switch (OTS) selector application. We found that both Te composition and difference in atomic radius of elements composing the telluride film are the key control parameters to maximize the OTS characteristics such as low leakage current (<5 nA for device area of 30 nm2), good switching endurance (108), and thermal stability (450°C).

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Key words

binary ots selectors,thermal stability,excellent selectivity,te-based

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