Precipitation of AldopedZnO(AZO) ceramic targets and determination of its resistance properties
The Chinese Journal of Nonferrous Metals(2013)
摘要
AZO(Aldoped ZnO) target materials were prepared by twostep sintering techniques. The AZO ceramic targets were characterized with XRD, SEM and EDS. And the resistance properties of AZO targets were analyzed. The results show that the second phase ZnAl2O4 is detected when Al2O3 doping concentration is 0.5% (mass fraction). ZnAl2O4 diffraction peaks are enhanced and the grain sizes of AZO target are reduced with increasing the doping concentrations. With increasing the secondsintering temperature θnd, the grain sizes of AZO targets and the relative density increase. The electrical resistivity reduces with increasing the secondsintering temperature θnd, while increases with increasing the doping concentration. The electrical resistivity is 2.9×10 −2 Ω∙cm at the fristsintering temperature of 1 400 ℃, the heating rate of 10 ℃/min, the secondsintering of 1 350 ℃ and holding time of 16h.
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