Stress Compensation in Hafnia/Silica Optical Coatings by Inclusion of Alumina Layers
Optical Interference Coatings (2010), paper WD5(2010)
摘要
Tensile stresses in hafnia/silica coatings used in vacuum are mitigated by alumina in the multilayer design. Inclusion of interfacial effects and the influence of different layer thicknesses allows the production of low-compressive-stress, high laser-damage-threshold coatings.
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