12.5 Mb/mm2 embedded MRAM for high density non-volatile RAM applications

K. Suh,J. H. Lee,H. M. Shin,J. M. Lee,K. M. Lee,Y. J. Hong, S. H. Han, Y. J. Kim,C. K. Kim, S. Pyo, H. T. Jung, Y. Ji, B. I. Seo, S. H. Hwang,D. S. Kim, Y. H. Kim, S. C. Oh, D. E. Jeong, K. T. Nam, B. S. Kwon, M. K. Cho,Y. J. Song,K. Lee,Y. G. Hong,G. T. Jeong

2021 Symposium on VLSI Technology(2021)

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摘要
We demonstrate 28-nm embedded MRAM (eMRAM) macro for non-volatile RAM (nvRAM) applications, featuring macro density of 12.5 Mb/mm2, write speed < 100 ns, 10-yrs retention at 125 °C, and endurance > 1E9 cycles. This is the smallest 28-nm nvRAM-type eMRAM macro reported to date and provides ~2× area saving compared to SRAM while providing native non-volatility and low stand-by power.
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