Microhardness, Resistivity and Tribological Properties of Coatings Based on Hf/Hfn Bilayers Deposited By Sputtering

Jorge Bertin González,Julian Hernández Torres,Nelly Flores-Ramírez,Ricardo Orozco Cruz, Jorge Hernandez, Jehud Beltrán Vela,Leandro García González

ECS Transactions(2022)

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摘要
In this work, coatings based on hafnium/hafnium nitride (Hf/HfN) bilayers were synthesized by the magnetron sputtering technique, producing coatings with 4, 8 and 16 Hf/HfN bilayers on AISI 316L steel and silicon (100). The surface morphology was studied, which shows a high uniformity of grain cluster groupings. Their microhardness was evaluated where the hardness of the 316L steel was improved by more than 3 orders of magnitude, with a value of 6.71 GPa for 8 Hf/HfN bilayers, this same condition reached a high value of electrical resistivity of 6.55x1014 µΩ-cm, a reduction in the coefficient of friction by about 25% with respect to 316L and presented a total delamination of the coating at 19.77 N, which could allow these coatings to be canted for corrosion protection of 316L steel.
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关键词
hf/hfn bilayers,coatings,tribological properties,resistivity
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