Design, Fabrication and Characterization of High-G Acceleration Sensors for Automotive Industry and Test Structures for the Process Characterization

Alexey Shaporin, Sebastian Weidlich, Dirk Wünsch,Susann Hahn,Roman Forke,Karla Hiller,Harald Kuhn

2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)（2022）

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摘要

This paper is dedicated to the development of high-g acceleration sensors for automotive industry. Most of our designed sensors target the common measurement range of ±400 g with a 0.2 g threshold sensitivity. Additionally, all sensor variants have to survive permanent shocks up to 4,000 g. We report on the design, fabrication and characterization of various MEMS sensor elements as well as on addi...

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