Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology

Taiki Uemura,Byungjin Chung, Jegon Kim,Hyewon Shim, Shinyoung Chung,Brandon Lee,Jaehee Choi,Shota Ohnishi, Ken Machida

2022 IEEE International Reliability Physics Symposium (IRPS)（2022）

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摘要

This paper presents thermal-neutron soft error rates (tnSER) in 7 nm bulk-FinFET technology with applied Cobalt (Co) contact. A thermal-neutron irradiation test at MURR shows tnSER reduction in the 7 nm: the tnSER in the 7 nm (Co-contact) is 0.0012X of the tnSER in 14 nm (Tungsten (W)-contact). Simulation analysis shows that tnSER changed by 0.21X due to the advancement of transistor technology (f...

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关键词

Radiation effects,Analytical models,Error analysis,Random access memory,Tungsten,FinFETs,Transistors

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