Experimental investigation of the electron sheath resonance (ESR) effect in parallel plate radio-frequency capacitively coupled plasmas

We have conducted a systematic experimental investigation on the electron heating mechanism named as electron sheath resonance (ESR) effect, with a parallel plate discharge configuration under various experimental conditions. In all conditions, a clear plasma density peak was observed at the magnetic field for ESR, providing a direct evidence for the effect. Further analysis suggests that the more significant ESR effect should appear at higher frequency, lower pressure discharges with larger electrodes. The results form a basis for further studies of the ESR effect, which is also meaningful to practical applications such as etching and thin film deposition processes.