Biomolecule sensing in THz range with n-Ge/Si antennas

C. A. Chavarin, A. A. Wiciak, E. Hardt, S. Gruessing,O. Skibitzki, I Costina, W. Seifert,W. M. Klesse,C. L. Manganelli,C. You,J. Flesch,J. Piehler,M. Missori,W. Koczorowski,L. Baldassarre, B. Witzigmann,G. Capellini,D. Spirito

2021 46TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ)（2021）

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摘要

We present n-doped germanium-on-silicon (Ge-on-Si) antennas fabricated with CMOS mainstream methods, showing resonances between 0.1 and 0.7 THz for sensing applications. After surface functionalization with alpha-lipoic acid, a red-shift of the antenna resonance is observed, as demonstrated by THz time domain spectroscopy. Similar results are obtained with silicon nitride (Si3N4)-coated antennas, enabling microfluidic integration. Finally, we compare antennas of bow-tie slots to antennas fabricated via maskless photolithography.

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关键词

α-lipoic acid,red-shift,antenna resonance,THz time domain spectroscopy,silicon nitride,biomolecule sensing,CMOS mainstream methods,surface functionalization,n-doped germanium-on-silicon antennas,microfluidic integration,maskless photolithography,frequency 0.1 THz to 0.7 THz,Si3N4,Ge-Si,Si

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