Optical Imaging Interferometric Microscopy with Grating Coupler Illumination

Preyom Dey,Alexander Neumann,S. R. J. Brueck

Frontiers in Optics + Laser Science 2021（2021）

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摘要

A new technique of extending the resolution limit for synthetic aperture microscopy with off-axis coherent illumination through a superstrate is used to image a 120nm CD structure with a 0.4NA lens at 532nm (Abbe limit:~665nm).

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optical imaging interferometric microscopy

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